1550-nm InGaAsP multi-quantum-well structures selectively grown on v-groove-patterned SOI substrates
We report direct growth of 1550-nm InGaAsP multi-quantum-well (MQW) structures in densely packed, smooth, highly crystalline, and millimeter-long InP nanoridges grown by metalorganic chemical vapor deposition on silicon-on-insulator (SOI) substrates. Aspect-ratio-trapping and selective area growth techniques were combined with a two-step growth process to obtain good material quality as revealed by photoluminescence, scanning electronic microscopy, and high-resolution X-ray diffraction characterization. Transmission electron microscopy images revealed sharp MQW/InP interfaces as well as thickness variation of the MQW layer. This was confirmed by atom probe tomography analysis, which also suggests homogenous incorporation of the various III-V elements of the MQW structure. This approach is suitable for the integration of InP-based nanoridges in the SOI platform for new classes of ultra-compact, low-power, nano-electronic, and photonic devices for future tele- and data-communications applications.